Abstract

Micro-nozzles play a critical role in various applications, such as micro-/nano-satellites in aerospace and heat dissipation and cooling in microelectronic systems (MEMS). The flows inside micro-nozzles can experience both continuum and rarefied flow due to their small size. In this research, we explore the optimal geometry configuration of micro-nozzles to achieve comprehensive performance and size, as well as background pressure compensation. Using classical computational fluid dynamics (CFD) and direct simulation Monte Carlo methods (DSMC), we investigate the effects of the expansion ratio, cross-profile shape, and plug on the performance of micro-nozzles operating over a wide range of pressures (0.5−100kPa). The results reveal that micro-nozzle performance is influenced by the interplay between flow expansion and viscous loss induced by the subsonic layer next to the micro-nozzle wall. The findings show that micro-nozzle performance improves with increasing expansion ratio in slip and continuum flow regimes, but decreases in the transition flow regime. Additionally, the results indicate that the axisymmetric micro-nozzle (with a circular cross-profile) outperforms the linear micro-nozzle (with a rectangular cross-profile) in terms of both performance and size when subject to the same conditions, making it the recommended choice for practical applications. We also find that plugs designed at the throat decrease performance, but increase stability under diverse background pressures. This study provides valuable insights for the design of high-efficiency micro-nozzles in applications such as nanosats and MEMS heat dissipation units.

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