Abstract
ZnO thin films have been grown on C-plane sapphiresubstrates by plasma-enhanced metal-organic chemical vapour deposition.The samples are then annealed at a higher temperature. Theresistivity, concentration of electron, mobility and optically pumpedthreshold of both as-grown and annealed films are investigated. Furthermore,their structural and optical properties are also examined with x-raydiffraction, emission spectra and optical transmission spectra. The resultsindicate that the quality of ZnO thin films can be improved by annealing.
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