Abstract
The two-dimensional snake scanning of the CCD method provides an effective solution to measure small-scale light spots which are smaller than one CCD pixel. The influences of the A/D conversion digits and response uniformity of the CCD on the measurement error are studied. When the A/D conversion digit is 20, the measurement error can be ignored. The maximum error value of the nonuniform response of the CCD pixel when the order of the super-Gaussian function is 10 is 0.7 μm. The research results can be used to guide the experiment.
Highlights
Academic Editor: Dieter Hoffman e two-dimensional snake scanning of the CCD method provides an effective solution to measure small-scale light spots which are smaller than one CCD pixel. e influences of the A/D conversion digits and response uniformity of the CCD on the measurement error are studied
In this paper, based on the theoretical model of the precise detection technology of the small-scale focal spot, the influence of the A/D conversion digits of the CCD on the measurement error is numerically simulated and analyzed, and the influence of the nonuniform response of a single CCD pixel on the measurement of the focal spot centroid position is studied. e research results can be used as the theoretical basis for the experimental research of small-scale focal spot detection and location
When the response mode of a single CCD pixel is uniform, the simulation results of the relative intensity distribution and gray scale distribution of the ideal Gaussian focal spot with a diameter smaller than the size of a CCD pixel as shown in equation (2) are shown in Figure 3. e centroid position of the focal spot is (0.0 μm, 0.0 μm), which is consistent with the position of the original focal spot
Summary
Academic Editor: Dieter Hoffman e two-dimensional snake scanning of the CCD method provides an effective solution to measure small-scale light spots which are smaller than one CCD pixel. e influences of the A/D conversion digits and response uniformity of the CCD on the measurement error are studied.
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