Abstract

The effect of varying xenon content in Ne/Xe/HCl mixtures on the discharge characteristics, with a non-uniform preionization conditions, is clarified in the frame of this work. With these mixtures, the excimer lasers and lamps are generated. The present study is performed using a transverse one-dimensional description of the plasma discharge. In this description, a set of resistances in a parallel connection represents the plasma, and in which the value of each one depending on the electron density. The computational results show clearly, that the xenon content can also contribute to the worsening of the macroscopic non-uniformity occurring in such mixtures. At the plasma center, the densities of current and deposited power pass from values 0.4 kA/cm2, 9.7 MW/cm3 for [Xe]=0.5% to values 0.75 kA/cm2, 24.6 MW/cm3 for [Xe]=5%, respectively.

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