Abstract
X-ray diffraction strain measurements and elastic recoil detection analysis of aluminum conductor lines, passivated with silicon oxide, showed that the absorption of water molecules in the passivation layer directly influences the strain state in the lines. Volume changes of the passivation due to water absorption lead to unusual strain states, where the line is strained in compression in the width direction and in tension in the height and length direction, with the largest component in the height direction. The process of water absorption, as well as the rearrangement of the strain components in the lines, was found to be reversible.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
