Abstract
The change in crystallographic orientation during nitride coatings formation based on titanium and zirconium is studied depending on changes in the concentration ratios for the gas and metal components of the plasma flows and their energy effects on the treated substrate during vacuum ion-plasma (VIP) treatment. It is shown that a decrease in the interaction energy of the gas-metal plasma flow with the surface contributes to the transition of the texture formation of the phase composition to the non-texture.
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