Abstract
Recently, laser pulses on a three-dimensional atom probe have been used to trigger the field evaporation. The advantages of laser-pulse atom probes are high mass resolution and application to higher resistivity materials such as semiconductors. Most recent studies using laser pulses have indicated that the field evaporation of atoms occurred by a thermal pulsing mechanism. In this study, we analyzed the metal specimens, tungsten, nickel and aluminum, by using the hand-made 3DAP in our laboratory, and verified the mechanism of field evaporation by laser pulses. From the results, the spatial resolution might be extremely better at lower tip temperature. The difference of mass resolution between the laser-irradiated and shadow sides was observed and this might resulted from the difference of cooling duration in both sides. In the reconstruction calculation, the difference of curvature radii in the laser-irradiated and shadow sides was compensated and the spatial resolution was evaluated. [DOI: 10.1380/ejssnt.2011.375]
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
