Abstract
The influence of the thickness of the a-Si : H film on its optical properties was studied using spectrophotometric measurements of the film transmittance and reflectance in the wavelength range 200– 3000 nm . Both the refractive index and the absorption coefficient were found to increase as the film thickness increased and the absorption edge shifted to lower energies. Both the optical energy gap, E g, and Urbach parameter values, E 0, decreased with increasing thickness. This decrease in E g and E 0 was slow for thicknesses above 400 nm .
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