Abstract
Abstract The parameter space regions and the sheath formation in an electronegative discharge in the presence of thermal positive ions and oblique magnetic field are investigated. It is assumed that the negative species are in thermal equilibrium and the positive ions have a finite temperature. Three regimes of uniform, multilayer stratified and pure stratified are found as functions of positive and negative ion temperature, electronegativity and the magnetic field. The influence of positive ion temperature in the presence of magnetic field on the profiles of the positive ion density, positive ion velocity and electric potential are investigated. The positive ion flux at the sheath edge as a function of magnetic field is obtained for different collisionality and positive and negative ion temperatures. Finally, the influence of the magnetic field, collision frequency and the positive ion temperature on the parameter space regions are discussed.
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