Influence of the Static Pre-Stress in Micro-Viscothermoelastic Resonators Based on Dual-Phase-Lagging Heat Conduction

Najat A Alghamdi,Hamdy M Youssef

doi:10.1155/2020/1316281

Abstract

Thermal and mechanical relaxation times play vital roles in the values of the quality factor of micro/nanoresonators. They can control the energy dissipation across the coupling of mechanical and thermal behavior. In this paper, we introduce an analytical model that considers a pre-stress in a micro-viscothermoelastic resonator to modify the thermal and mechanical relaxation times and thus higher the quality factor. The impacts of length scale and static pre-stress on the quality factor have been discussed. The model expects that significant improvement in terms of quality factors is possible by tuning the pre-stress and the thermal and mechanical relaxation times parameters, and the isothermal value of frequency have significant effects on the thermal quality factor of the resonators.

Highlights

Many applications based on microelectromechanical resonators are essential in different fields, such as mechanical signal processing, scanning probe microscopes, and ultrasensitive mass detection. e most critical parameter of micro-viscothermoelastic resonators is the quality factor Q
We present an analytical model that considers a pre-stress in a micro-viscothermoelastic resonator to quantify the quality factor Q
The relationships between the variation of the thermoelastic damping with the beam height h, and the beam length in different values of the applied axial force F on the microbeam resonator, which is made of silicon and clamped at two ends, will be explored

Summary

Introduction

Many applications based on microelectromechanical resonators are essential in different fields, such as mechanical signal processing, scanning probe microscopes, and ultrasensitive mass detection. e most critical parameter of micro-viscothermoelastic resonators is the quality factor Q. Zener [5,6,7] is the first who introduced the Q-factor in thermoelastic dissipation, and he gave an approximate analytical form of it He has studied the thermoelastic damping in beams by treating the viscoelastic material. Guo et al [22, 23] studied the thermoelastic damping theory of micro- and nanomechanical resonators by using the DPL model. Experimental results have been utilizing the frequency change to tune resonators These experiments suggest an increase in the Q-factor with the application of tensile stress [3, 29]. We present an analytical model that considers a pre-stress in a micro-viscothermoelastic resonator to quantify the quality factor Q. We analyze the results with respect to the resonator size and pre-stress and compare the analytical results with the experimental results available in the literature

Basic Equations and Model Formulation

Numerical Results and Discussion

Conclusion