Influence of the specific pump power on the output energy and efficiency of a 223-nm gas-discharge-pumped excimer KrCl laser

Abstract

The influence of the specific pump power on the output energy and efficiency of a 223-nm gas-discharge-pumped KrCl excimer laser operating on the Ne—Kr—HCl and He—Kr—HCl mixtures is studied. The optimal specific pump powers are found at which the maximum values of the total efficiency and output energy of the KrCl laser are achieved. The optimal specific pump power for the Ne—Kr—HCl and He—Kr—HCl mixtures lies in the ranges from 5.0 to 5.5 MW cm-3 and from 5.8 to 6.5 MW cm-3, respectively. The output energy of 700 mJ at the efficiency 1.0% for the KrCl laser on the Ne—Kr—HCl mixture is obtained for the first time.