INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES

Deiler Antonio Lima Oliveira,Vladimir Jesus Trava-Airoldi,Evaldo José Corat,Anderson Oliveira Lobo,Fernanda Roberta Marciano

doi:10.18066/revunivap.v18i31.50

Deiler Antonio Lima Oliveira, Vladimir Jesus Trava-Airoldi + Show 3 more

Open Access

https://doi.org/10.18066/revunivap.v18i31.50

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Abstract

Diamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves.

Highlights

Diamond-like carbon (DLC) films have been actively studied over the last decade in the field of material engineering
Bands that originate from sp2 sites, because the 514 nm (2.4 eV) excitation resonates with π → π* transitions at sp2 sites, so that the disorder band will overshadow the contribution of sp3 sites (ROBERTSON, 2002)
In the initiation of the process, a small area of the film began to be detached in front of the indenter and optical observations of the DLC films according to the silicon interlayer thickness in the ending of scratch (40 N of load)

Summary

INTRODUCTION

Diamond-like carbon (DLC) films have been actively studied over the last decade in the field of material engineering. Consisting of dense amorphous carbon or hydrocarbon, DLC mechanical properties fall between those of graphite and diamond (ROBERTSON, 2002; DONNET et al, 1999; DONNET; GRILL, 1997). The adhesion of DLC films to substrate materials can restrict their applications (YATSUZUKA et al, 2008). Other authors have been studied the use of a silicon interlayer in order to improve DLC adhesion on metallic substrates (BONETTI et al, 2006; CAPOTE et al, 2008). In this paper, it was investigated the influence of silicon interlayer on DLC films deposited on glass substrates

EXPERIMENTAL PROCEDURES

RESULTS AND DISCUSSION

CONCLUSION