Abstract
The excited atoms of the target material are ejected during an ion bombardment of solids. These atoms belong to one of two velocity groups — fast or slow. The fast atoms arise in binary collisions of bombarding ions with target atoms and the slow ones are knocked out as a result of a sputtering process. Excited atoms flying off the surface intersect the solid-vacuum boundary and can transfer their excitation energy in the radiationless transitions mainly of the resonance ionization type. The probability of this process depends strongly on the electronic energy level structure of solids and a velocity of ejected atoms. On this statement our method of the electronic energy level structure of solids study is based by means of investigation of excited atoms velocity spectrum.
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