Influence of the pulse duration at the laser processing of nitride ceramics

Abstract

This paper presents results on laser ablation of AlN and Si3N4 ceramics by laser pulses with different duration. Three types of laser systems, a Nd:YAG one, operated at wavelength of 1064 nm and pulse duration of 15 ns, a Nd:YAG, operated at wavelength of 1064 nm and pulse duration of 10 ps, and a femtosecond laser system, operated at 800 nm, with a pulse duration of 75 fs, are used for experiments. Details on the ablation efficiency, surface morphology, and the chemical composition of the irradiated zones as a function of the pulse duration are given and discussed. It is demonstrated that the ablation rate (ablation depth per pulse) is highest for processing with nanosecond pulses and it is lowest for the femtosecond regime. The laser ablation results in significant change of the surface morphology, as its characteristics are influenced by the pulse duration. For all pulse durations conditions for formation of ripples structures are found. The ablation process is realized by decomposition of the ceramics and the composition of the remaining surface layer is governed by oxidation and carbonization.