Abstract

This paper reports on the study of microporous polydimethylsiloxane (PDMS) foams as a highly deformable dielectric material used in the composition of flexible capacitive pressure sensors dedicated to wearable use. A fabrication process allowing the porosity of the foams to be adjusted was proposed and the fabricated foams were characterized. Then, elementary capacitive pressure sensors (15 × 15 mm2 square shaped electrodes) were elaborated with fabricated foams (5 mm or 10 mm thick) and were electromechanically characterized. Since the sensor responses under load are strongly non-linear, a behavioral non-linear model (first order exponential) was proposed, adjusted to the experimental data, and used to objectively estimate the sensor performances in terms of sensitivity and measurement range. The main conclusions of this study are that the porosity of the PDMS foams can be adjusted through the sugar:PDMS volume ratio and the size of sugar crystals used to fabricate the foams. Additionally, the porosity of the foams significantly modified the sensor performances. Indeed, compared to bulk PDMS sensors of the same size, the sensitivity of porous PDMS sensors could be multiplied by a factor up to 100 (the sensitivity is 0.14 %.kPa−1 for a bulk PDMS sensor and up to 13.7 %.kPa−1 for a porous PDMS sensor of the same dimensions), while the measurement range was reduced from a factor of 2 to 3 (from 594 kPa for a bulk PDMS sensor down to between 255 and 177 kPa for a PDMS foam sensor of the same dimensions, according to the porosity). This study opens the way to the design and fabrication of wearable flexible pressure sensors with adjustable performances through the control of the porosity of the fabricated PDMS foams.

Highlights

  • Flexible pressure sensors have raised strong interest in non-invasive health monitoring applications [1]

  • PDMS foams with different porosities were obtained by controlling the size and the concentration of sugar crystals mixed with PDMS in the fabrication process

  • The obtained foams were characterized in terms of porosity, and electromechanical characterizations of capacitive PDMS

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Summary

Introduction

Flexible pressure sensors have raised strong interest in non-invasive health monitoring applications [1]. These drawbacks limit the performances of PDMS-based capacitive sensors They enable a large pressure measurement range to be reached (over a 400 kPa pressure range [2,7,11]); the sensitivity is rather low (in the order of 1%.kPa−1 for pressure

Sensor Principle
Fabrication Process
Characterization of the PDMS Foams
Sensor Electromechanical Characterizations
Measurement Setup
Sensor
Influence of the Foam Pore Sizes
Influence of the Foam Thickness
Findings
Conclusions
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