Abstract

Mn1.56Co0.96Ni0.48O4±δ (MCN) thin films with different oxygen pressures (in the range of 2 × 10−4 to 2 Pa) are prepared on Si(100)/SiOx substrates by pulsed laser deposition technique. Effects of oxygen pressures on the microstructure and optical properties of the prepared thin films are investigated in detail. The grain sizes of films gradually decrease and the preferential orientation of the MCN films change from (400) to (113) as the oxygen pressure increases. The x-ray photoelectron spectroscopy results show that the composition of these films is proximity to that of the bulk material. In addition, the Mn3+/Mn4+ pairs increase with an increase in the oxygen pressures increase. From spectroscopic ellipsometer spectroscopy, it is found that both the refractive index n and extinction coefficient k of the (400)-oriented films have no obvious peaks, whereas in the (113)-oriented films, peaks are exist. This feature typically originates from a change in the crystal structure as oxygen pressures increase. Furthermore, the Raman active mode (around ca. 650 cm−1) of (400) films almost disappears, whilst the active mode in (113) films remain.

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