Abstract
Influence of the Oxygen during the Deposition of an Indium Tin Oxide Thin Film by Magnetron Sputtering for Heterojunction Solar Cells
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https://doi.org/10.1134/s1063782623050081
Journal: Semiconductors | Publication Date: Sep 1, 2023 |
Influence of the Oxygen during the Deposition of an Indium Tin Oxide Thin Film by Magnetron Sputtering for Heterojunction Solar Cells
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