Influence of the N<SUB>2</SUB> Partial Pressure on the Characteristics of CrZrN Coatings Synthesized Using a Segment CrZr Target

Abstract

In this study, CrZrN films were synthesized by unbalanced magnetron sputtering (UBM) under various N2 partial pressures and their characteristics such as crystalline structure, surface morphology, microstructure and mechanical properties as a function of the N2 partial pressures were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation, wear tests, and corrosion tests. Results revealed that, with increasing the N2 partial pressure from 0.05 to 0.21 Pa, the nitrogen content of the films increased from approximately 40.9 to 53.7 at%, the deposition rate decreased from approximately 100 to 59 nm/min and the surface roughness (Rms value) was increased from approximately 0.57 to 1.79 nm. The Cr37.3-Zr9.0-N53.7 film has the highest hardness, elastic modulus, and plastic deformation resistance of 36 GPa, 380 GPa, and 0.41, respectively. The Cr37.3-Zr9.0-N53.7 film also has the lowest friction coefficient and wear rate of 0.19 and 3.01 (10(-6)m3/Nm) at room temperature. In addition, the potentiodynamic test results showed the corrosion resistance of the CrZrN films became increased significantly and their corrosion current density (i(corr)), corrosion potentials (Ecorr) and corrosion rate decreased with increasing N2 partial pressure.