Abstract

Polycrystalline ceramic specimens of 96% sintered alumina and mechanically polished 99.5% alumina were bombarded by Aru ions at an applied voltage of 7 kV at various incident angles from 0 to 1.4 rad (0 to 80°) and at a beam current of about 70 μA. The influence of the incidence angle on alumina surface cleanness, roughness and topography was investigated.

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