Abstract
MoO 3 is a host material which undergoes reversible lithium intercalation at ambient temperature; this property makes this material attractive candidate for the cathode in a secondary lithium battery. Thin-films of this layered compound have been prepared using flash and thermal evaporation techniques. We have measured the structural properties of the flash-evaporated MoO 3 films. The influence of the different growth conditions have been investigated on the crystallinity of these films. Micro-batteries fabricated with cathode films formed at moderate temperature in the range 30–250°C exhibit a monotonous discharge voltage, indicating that the material remains in a single phase even for high lithium intercalation. Influence of the growth conditions on electrochemical features of MoO 3 film-cathodes in lithium microbatteries is investigated. For cathode films prepared at 250°C, lithium diffusion coefficients are in the range 10 −12-10 −11 cm 2 s −1 in Li x MoO 3.
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