Abstract

Diffuse dielectric barrier discharges in atmospheric-pressure helium can be sustained over a wide range of excitation frequencies (from, but not restricted, 25 kHz to 15 MHz). The aim of the present paper is to identify the specific characteristics of the discharge modes that can be sustained in this frequency range, namely, the atmospheric-pressure Townsend-like discharge (APTD-L) mode, the atmospheric-pressure glow discharge (APGD) mode, the Ω mode, the hybrid mode, and the RF-α mode. This is achieved experimentally, by measuring the density of helium metastable atoms, which are known to play a driving role on the discharge kinetics. This density is measured by means of two absorption spectroscopy methods, one using a spectral lamp and the other one using a diode laser as a light source. The first one provides the time-averaged atom densities in the singlet He(21S) and triplet He(23S) metastable states, while with the second one we access the time-resolved density of He(23S) atoms. Time-averaged measurements indicate that the He(23S) density is relatively low in the APTD-L, the Ω and the RF-α modes (<4×1016 m−3) slightly higher in the APGD mode (2–7×1016 m−3), and still higher (>1×1017 m−3) in the hybrid mode. The hybrid mode is exclusively observed for frequencies from 0.2 to 3 MHz. However, time-resolved density measurement shows that at 1 MHz and below, the hybrid mode is not continuously sustained. Instead, the discharge oscillates between the Ω and the hybrid mode with a switching frequency about the kilohertz. This explains the significantly lower power required to sustain the plasma as compared to above 1 MHz.

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