Abstract
Classical methods for contrast measuring do not consider change of absorbed dose with resist depth. In the work absorbed dose distribution in resist was calculated by Monte-Carlo method and the absorbed dose increasing from resist surface to substrate was found. An approach for the resist contrast determination insensitive to dose variations with depth was proposed. Using the method resist contrast is obtained and compared with resist contrast measured by classical methods. A relation between these two values was derived. The comparison showed that dependence of absorbed dose with resist depth results effectively to increase of contrast value measured with classical methods, the increase is sometimes rather significant.
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