Abstract
Molecular electronic sensors of motion parameters use miniature electrochemical cells as a sensitive element, in which the interelectrode current is sensitive to external mechanical influences. New approaches for creating conversion elements are based on precision methods of micromachining materials. The use of new technologies has opened up the possibility of creating sensitive elements with configurations that have not been previously studied, and for which there is no clear understanding of the regularities that determine the output parameters depending on the geometry of the conversion elements. This work studies the influence of the dielectric coating on the surface of the cathodes on the conversion coefficient. The transforming structure has been made from three plates. The outer plates were an anode–cathode electrode pair. The middle plate served as a separator between the pairs of electrodes. It was found that an insulating layer on the side of the cathode facing away from the adjacent anode allows the conversion factor to be doubled. This result is applicable for a wide class of conversion elements made with microelectronic technologies, as well as structures made of mesh electrodes.
Highlights
Molecular electronic sensors of motion parameters and wave fields use miniature electrochemical cells as a sensitive element, in which the interelectrode current is very sensitive to external mechanical impact [1,2,3,4]
The success achieved in the technical characteristics and understanding of the broad commercial prospects of this direction, prompted researchers from around the world to develop technological solutions based on using precision methods of microfabrication, such as microelectronic fabrication and/or laser drilling [4,17,18,19,20], which reduce the scatter of parameters of sensitive elements, reduce their cost and prepare them for mass production
Hz, and conversion factor W (0.32) at 0.32 Hz, are summarized in Table 1, in columns 5 to 7
Summary
Molecular electronic sensors of motion parameters and wave fields use miniature electrochemical cells as a sensitive element, in which the interelectrode current is very sensitive to external mechanical impact [1,2,3,4]. State University [22] and the Institute of Electronics CAS [3,23,24] In this case, the technological processes of oxidation in a diffusion furnace [21], explosive photolithography and electron–beam deposition [21,22], laser cutting [3,21,24], low-pressure chemical vapor deposited (LPCVD) [22], plasma-enhanced chemical vapor deposited (PECVD) [22], focused ion beam (FIB) [22], deep reactive ion etching (DRIE) [3], Micromachines 2022, 13, 360. Note that the influence of the geometry of individual electrodes, including the presence or absence of a dielectric coating on the cathodes, is significant only at sufficiently high frequencies, namely, under the condition of f > f D , where f is the input signal
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