Abstract
SiBCN powders have been prepared by chemical vapor deposition using borazine and liquid polycarbosilane as source precursors in the deposition temperature range from 800 °C to 1100 °C, with the pressure of 10 kPa. The effect of the temperatures on the surface morphologies of the as-received powders was investigated by SEM. FTIR analysis of the powders was used to obtain the composition of the powders, and the XRD analysis was used to determine the crystalline state of the deposits. The results showed the powders were amorphous and composed of normally spherical grains.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
