Influence of temperature on structure as well as adhesion and friction and wear behavior of hydrogenated carbon nitride films prepared on silicon substrate

Abstract

Hydrogenated-carbon nitride (CNx:H) films were synthesized on silicon substrate in a large quantity by the pyrolysis of ethylenediamine in a temperature range of 700–950°C. The influence of temperature on the morphology, structure, adhesion to substrate, and friction and wear behavior of CNx:H films was investigated. It has been found that CNx:H films obtained at 700°C and 800°C are amorphous, and those prepared at 900°C and 950°C consist of carbon nitride nanocrystal. Besides, CNx:H film sample obtained at 700°C has the maximum N content of 9.1at.% but the poorest adhesion to Si substrate, while the one prepared at 900°C has the lower N content and the highest adhesion to substrate. As a result, nanocrystalline CNx:H (nc-CNx:H) film synthesized at 900°C possesses the best wear resistance when slides against stainless steel counterpart. N atom is incorporated into the graphitic network in three different bonding forms, and their relative content is closely related to temperature, corresponding to different adhesion as well as friction and wear behavior of the films obtained at different temperatures. Furthermore, the friction coefficient and antiwear life of as-deposited CNx:H films vary with varying deposition temperature and thickness, and the film with thickness of 1.3μm, obtained at 900°C, has the longest antiwear life of over 180,000s.