Abstract
The impact of the discharge current density and nitrogen flow rate on the mechanical properties of titanium nitride films deposited by reactive magnetron sputtering of a hot target was studied. It was found that the films deposited at the highest discharge current density have the highest hardness and modulus of elasticity. These films have a texture with a significant predominance of the peak corresponding to the [111] direction in a face-centered cubic lattice of TiN.
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