Abstract
Sputtering experiments with different CoCrTa(Pt) alloys on a Cr based underlayer are described. With decreasing magnetic layer thickness a maximum of coercivity (around 2700 Oe) is observed at a layer thickness of 15 nm nearly independent of the Co alloy composition. The change of coercivity by a negative substrate bias during sputtering of the magnetic layer depends on the Cr content in the Co alloy with loss of coercivity for high Cr (>17 at%) containing Co alloys.
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