Abstract
A Monte Carlo simulation, taking into account of the detailed surface roughness of a realistic solid sample, has been performed to study the surface topography influence on elastic peak intensity. To describe quantitatively the surface topography effect, here we introduce surface roughness parameter (SRP) according to the ratio of elastic peak intensities between a rough surface and an ideal planar surface. Simulation results for Al sample have shown that SRP varies with surface roughness particularly at large incidence/emission angles.
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