Abstract
Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth profiling analysis of thin, insulating barrier anodic films formed on aluminium. It allows ready and rapid analysis of the films, with depth resolution and sensitivity comparable with, or better than, those of secondary ion mass spectrometry depth profiling. However, for successful application of the technique, surfaces of specimens should be microscopically flat; surface roughness of dimensions similar to the thickness of the films can lead to almost total degradation of the depth profiles. Copyright © 1999 John Wiley & Sons, Ltd.
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