Abstract
Commercial polycrystalline silicon solar cells were textured by the Laser Beam Interference Ablation technique to produce periodical grating in the antireflective and passivation layer. Modeling of periodical hole arrays and refractive index gratings in the antireflective coating on silicon substrate was used to select the fabrication regime and explain alterations in optical properties of the laser treated samples. Visual and elemental analysis of the laser treated areas was performed as well as measurement of photo-electrical characteristics before and after the laser treatment. Two modification regimes were established: ablation and oxidation of the antireflective layer. Changes in surface structure and composition as well as optical and electrical properties of patterned solar cells are discussed.
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