Abstract
Iron oxide films were prepared by ultrasonic spray pyrolysis (USP) on SiO2 coated Si wafers using iron acetylacetonate as an iron precursor. The crystallographic properties and surface morphologies of the films were characterized by X-ray diffraction and scanning electron microscopy, respectively. X-ray photoelectron spectroscopy (XPS) was carried out to determine the Fe oxidation states. The satellite peak associated with Fe3+ photoemission at a binding energy of ∼719 eV was detected in the XPS results for iron oxide films, which is one of the indications of the Fe2O3 composition. The as-deposited films exhibit a polycrystalline α-Fe2O3 structure. In order to observe thermal stability of the films, the resistance variation with ambient temperature was measured. All the iron oxide films deposited in this experiment were found to be α-Fe2O3 with the thermal stability lower than 2%/ °C.
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