Abstract
Optical thin films are used in many optical elements; however, light scattering can be problematic. We investigate the effect of substrate surface roughness on the light scattering of optical thin films. The substrates are classified according to their surface roughness, from fine to very rough, and coated with a single TiO2 layer or a SiO2/TiO2 multilayer. The light scattering intensity increases as the substrate roughness increases. Scanning electron microscopy reveals that the number of nodules formed in the optical thin films increases with the substrate roughness, which affects the light scattering properties.
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