Abstract
Highly bismuth-substituted iron garnet thin films are prepared on quartz substrates by using a radio frequency (RF) magnetron sputtering technique. We study the factors (process parameters associated with the RF magnetron sputter deposition technique) affecting the magneto-optical (MO) properties of ferrite garnet films of composition Bi2.1Dy0.9Fe3.9Ga1.1O12. All films show high MO response across the visible range of wavelengths after being annealed. In particular, the effects of substrate stage temperature and rotation rate on the various properties of films are studied. Experimental results reveal that the characteristics of garnet films of this type can be tuned and optimized for use in various magnetic field-driven nanophotonics and integrated optics devices, and that, at a substrate stage rotation rate near 16 revolutions per minute, the MO quality of the developed MO films is the best, in comparison with films deposited at other rotation rates. To the best of our knowledge, this is the first report on the effects of deposition parameters on the properties of garnet films of this stoichiometry.
Highlights
IntroductionBismuth (Bi)-substituted magneto-optical (MO) garnet materials are very attractive for use in various technological applications such as magnetic memory, magnetoplasmonic devices, magneto-optic sensors, lightwave polarization controllers, and MO spatial or temporal light modulators [1,2,3,4,5,6,7,8,9,10,11]
We investigate the effects of process parameters—in particular, the substrate stage temperature and substrate stage rotation rate—associated with the radio frequency (RF) sputter deposition technique, on the properties of garnet thin films sputtered in a pure argon atmosphere from an oxide-mix-based ceramic target material of composition type
Bi2.1 Dy0.9 Fe3.9 Ga1.1 O12 occurring in response to varying deposition process parameters have been studied and reported for the first time
Summary
Bismuth (Bi)-substituted magneto-optical (MO) garnet materials are very attractive for use in various technological applications such as magnetic memory, magnetoplasmonic devices, magneto-optic sensors, lightwave polarization controllers, and MO spatial or temporal light modulators [1,2,3,4,5,6,7,8,9,10,11]. They possess record-high Faraday or Kerr effects simultaneously with low optical losses in parts of the visible and near-infrared regions and are starting to become highly sought after for the development of cost-effective and reliable photonic devices and sensors.
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