Abstract
Gold layers were prepared by sputtering on polyethylene (PE) and glass. Sheet resistance, thickness, surface morphology and crystal structure of the layers were studied by two-point technique, gravimetry, AFM and XRD. Under the same conditions the growth rate of the layer is higher on the glass. On the glass a shorter sputtering time is needed for creation of an electrically continuous layer. Roughness of the underlying substrate affects roughness of deposited gold layer. From XRD analysis it was found that the gold layers deposited onto glass and PE digger by biaxial strength, size of crystallites and number of micro-deformations.
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