Abstract
The influence of strain distribution on morphology evolution of Ge/GeO2 core/shell nanoparticle confined in ultrathin Al2O3 thin film by surface oxidation is investigated. A finite-element simulation is performed to simulate the morphology evolution of the confined Ge/GeO2 core/shell nanoparticle under the influence of the local strain distribution. It indicates that the resultant oxidation-related morphology of Ge/GeO2 core/shell nanoparticle confined in ultrathin film is strongly dependent on the local strain distribution. On the other hand, the strain gradients applied on the confined GeO2 shell can be modified by the formation of polycrystalline GeO2 shell, which has potential application in tailoring the microstructure and morphology evolution of the Ge/GeO2 core/shell nanoparticle.
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