Abstract
The surface composition of several MoNi alloys was studied by X-ray photoelectron spectroscopy (XPS). The surface of each sample was scraped in situ and extensively sputtered by 1 keV Ar + ions. It was assumed that the surface composition after scraping is identical to the bulk composition. The ratio of the Mo and Ni elemental sensitivity factors was estimated as a function of the alloy composition. The change of surface composition during bombardment with 1 keV Ar + was also determined. The steady state composition was established and the ratio of elemental sputtering yields as a function of alloy composition was estimated. It was shown that the assumption of constant sensitivity factors and sputtering yields may result in a pronounced error in the quantitative XPS analysis. The influence of annealing on the surface composition was investigated for 25 at% Mo by Auger electron spectroscopy (AES). It was found that the surface is enriched in Ni after annealing.
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