Abstract
The effects of the Si-substrate doping concentration on electrical characteristics of back-gate (BG) and top-gate (TG) MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> field-effect transistors (FETs) are investigated. The experimental results show that MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> FETs fabricated on different-concentration Si substrates using the same processing have similar interface characteristics and surface roughness of gate dielectric but exhibit different carrier mobility, and the higher the doping concentration, the higher the carrier mobility. This is because the carriers in Si substrate can screen the phonon scattering from the low-energy surface optical phonon produced by the soft Hf-O bonds in HfO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> dielectric, which will couple with the carriers in MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> channel, resulting in the reduction of the mobility, and the higher the Si-substrate concentration, the better the screening effect. Also, it is found that the BG dielectric scattering will impact on the mobility of the TG transistor, which causes a similar change trend of carrier mobility to that of the BG MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> FET as the Si-substrate concentration increases. Therefore, it can be revealed that the Si-substrate concentration has an important influence on the carrier mobility of MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> FETs, and the high Si-substrate concentration is beneficial for fabricating high-performance BG and TG MoS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> FETs.
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