Abstract
To investigate the evolution of microstructure and wear behavior of TiSiN coatings with the variation of Si in targets and lays the foundation for its controllable mass production, Ti(1-x)SixN composite coatings were deposited onto Si (100) and cemented carbide substrates using TiSi targets with different Si content by cathodic arc ion plating. The influences of Si on the microstructure and mechanical properties were studied. Nano-amorphous composite structure appeared in the Ti(1-x)SixN coatings when Si content in TiSi target was higher than 5at%. However, further increase of Si content in TiSi target exhibited a negligible effect on the microstructure of Ti(1-x)SixN coatings. Hardness and deformation resistance were correlated to the content of Si in TiSi targets. Maximum hardness was obtained as the Si content in target increased up to 20at%. Friction coefficient and wear rate significantly decreased with addition of Si in TiN coating, and then dually increased with the increase of Si content in targets.
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