Abstract
In this work, the high-frequency magnetic permeability spectra of as-sputtered FeCoSiN films with various Si concentrations were investigated. The soft magnetic properties with an induced in-plane uniaxial anisotropy can only be obtained within some composition ranges because of the formation of different granular microstructures. The permeability spectra measured without any external fields (He) were well fitted based on the phenomenological Landau–Lifshitz–Gilbert equation. Results show that with the increase in Si concentration, the saturated magnetization 4πMs, the resonance frequency fr, the permeability μ, and the qualify factor Q values decrease, while the damping coefficient α and resonant frequency linewidth Δf increase. The increase in Gilbert damping coefficient α or G is ascribed to the increase in mosaicity or magnetic ripples with higher volume proportion of Si-rich matrix. The investigations on Δf-He relations indicate the extrinsic damping contribution from the two-magnon scattering in FeCoSiN, which is suggested to be due to the change in the granular microstructures compared with FeCoN.
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