Abstract
An analytical approach is presented that allows one to determine the influence of the scandium concentration on the input electrical impedance of piezoelectric transducer based on aluminum scandium nitride. The scandium concentration dependences of the properties aluminum scandium nitride affecting on the transducer impedance were determined by means of the approximation of the dependences obtained from their experimental values for various Sc concentration. Based on the frequency dependences of the impedance the influence of Sc concentration in Al1-xScxN piezoelectric layer on the frequencies of the serious and parallel resonance of the unloaded and loaded transducer has been established.
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