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Abstract
Chromium nitride coatings were synthesized by DC magnetron sputtering techniques. Optical emission spectroscopy (OES) was applied to investigate the role of the different level RF substrate biases. The results show that the main chemical reaction process occurred on substrate surface and OES signal ratio I(N 2 )/I(Cr) can be used to predict the composition evolution. Ion bombardment effects were identified, especially in the range from 60 V to 100 V, they provide benefits to make coating denser and improve mechanical properties.
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