Abstract

In this work, we report the effect of deposition time on the physical properties such as structural, morphological, optical and electrical properties of aluminium and indium co-doped ZnO (AIZO) thin films. AIZO films were deposited by ultrasonic spray pyrolysis technique on glass substrates at different deposition times (10, 12 and 15min) using ball milled zinc precursor. A change in crystalline nature was observed from structural analysis with respect to growth time. AIZO thin films with hexagonal nanostructures and optical transmittance higher than 70% were confirmed from the morphological and optical studies. AIZO films showed an electrical resistivity varying in the range of 2.35–4.59×10−3Ωcm. Finally, when we compared these results with AIZO films deposited using unmilled zinc precursor; we found that ball milling the precursor has a beneficial effect in enhancing the physical properties.

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