Abstract
Aluminum-doped zinc oxide films (AZO) were deposited on glass substrates by magnetron sputtering. The effect of RF power and deposition temperature on wettability and optical properties of AZO films are studied in detail. The increase of RF power from 60W to 180W (power density from 1.54 to 4.62W/m2) leads to evolution of (100), (002) and (101) textures of zinc oxide. The XRD results shows increased preferred orientation of (002) plane along c-axis for deposited AZO films. The grain size increases from 14nm to 23nm with increase of RF power from 60W to 180W and from 17nm to 25nm with increase in deposition temperature from 200°C to 600°C. The static and dynamic contact angle formed by water and ethylene glycol varies as a function of RF power and deposition temperature. AZO films with an optical transmission 80% to 60%, refractive index 1.49 to 1.51 and band gap values from 3.29eV to 3.21eV were obtained in the wavelength range of 350–800nm. The electric resistivity varies from 3.9×10−2 to 1.1×10−2Ω·cm depending upon variation of RF power and deposition temperature.
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