Abstract

Laser-induced damage threshold LIDT results on silica sub- strates and coatings are presented for near-infrared applications. Differ- ent polishing and cleaning processes are evaluated. In particular, we investigate the influence of polishing and cleaning on the LIDT of silica substrates and optical coatings deposited by dual-ion-beam sputtering. Laser damage tests were performed at 1064 nm with a 5-ns-pulse Nd:YAG laser, and experiments were made on surfaces of optical com- ponents using a 12-m-diameter focused beam. Accurate damage prob- ability curves are plotted thanks to a reliable statistical measurement of laser damage. Use of a statistical model permits us to deduce the den- sities of laser damage precursors. We find a significant improvement of the LIDT of our coatings on choosing the appropriate cleaning and pol- ishing process.

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