Abstract
SnOx thin films were synthesized by magnetron sputtering and sol–gel technique. Then films were treated by O- and H-plasmas. The structure, optical and electrophysical properties of films were analyzed. Differences between optical transmission spectra in the near infra-red region of the films synthesized by the two methods were explained by absence of tin nanoparticles in films synthesized by the sol–gel technique. The structure of these films was more fine-grained in comparison to those deposited by magnetron sputtering. By analysis of optical transmission spectra and Х-ray diffraction data it was shown that the films synthesized by the sol–gel technique have higher porosity and a more uniform composition and as consequence a higher gas sensitivity. The influence of O-plasma and H-plasma treatments on the increase of sensitivity for both types of films is studied.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Materials Science: Materials in Electronics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
