Abstract
Laser-induced surface acoustic waves (SAWs) were used to study the influence of oxygen on the elastic properties of nanocrystalline diamond films. A series of samples was grown by chemical vapor deposition (CVD) on the (1 0 0) plane of p-type silicon for 3 h under different O 2/(CH 4 + H 2) flow ratios from 0% to 8%. The elastic properties of these nanocrystalline diamond films were determined from the SAW dispersion curves. The maximum frequency realized was about 310 MHz in wideband SAW experiments and about 700 MHz using a narrowband mask method with several higher harmonics. It was found that the densities of all samples were surprisingly high, approaching the ideal value of diamond, whereas the Young’s modulus increased from 700 to 950 GPa with the addition of oxygen. It is concluded that oxygen has a significant positive effect on the elastic properties of nanocrystalline diamond.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
