Influence of oxidation temperature on the interfacial properties of n-type 4H-SiC MOS capacitors

Abstract

The effect of oxidation temperature on interfacial properties of n-type 4H-SiC metal-oxide-semiconductor capacitors has been systematically investigated. Thermal dry oxidation process with three different oxidation temperatures 1200°C, 1300°C and 1350°C were employed to grow SiO2 dielectric, following by the standard post-oxidation annealing (POA) in NO ambience at 1175°C for 2h. The root mean square (RMS) roughness measured by Atomic Force Microscopy for the thermally grown SiO2 before POA process is reduced with increasing the oxidation temperature, obtaining an atomically flat surface with a RMS of 0.157nm from the sample oxidized at 1350°C. Several kinds of electrical measurements were used to evaluate the densities of near interface traps and effective fixed dielectric charge for the samples, exhibiting a trend reduced with increasing the oxidation temperature. The interface state density of 3×1011cm−2eV−1 at 0.2eV from the conduction band edge was achieved from conductance method measurement for the sample oxidized at 1350°C. The results from Secondary Ion Mass Spectroscopy and X-ray Photoelectron Spectroscopy demonstrate that high oxidation temperature can reduce the width of transition layer, the excess Si and silicon suboxide compositions near the interface, leading to effective improvement of the interfacial properties.