Abstract
We studied the influence of nitrogen vacancies on the nitrogen K-edge energy-loss near-edge-structure (ELNES) spectra of TiN x , as seen by first-principles band structure calculations. We find that the nitrogen K-ELNES is highly sensitive to the interaction between the vacancy site and the excited atom. Changes in the ELNES are observed only when a N vacancy occurs at the second nearest neighbor site of the excited atom, a fact which can be interpreted as arising from effects exerted by the local electronic structure around the N vacancy.
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