Abstract
The pure and Ni-doped Ba0.6Sr0.4TiO3 thin films were prepared on Si and LaNiO3/Si substrates via sol-gel technique, respectively. The microstructure and surface morphology of the films were characterized using x-ray diffraction and atomic force microscope. The films on LaNiO3/Si substrate were well-crystallized of the perovskite structure, and the diffraction peaks corresponded to BST standard pattern quite well. The Raman spectra showed the Ni dopant could improve the crystal quality of the BST films on Si substrate. The optical properties of the pure and Ni-doped films were studied by spectroscopic ellipsometry at room temperature.
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