Abstract

The influence of F2 dissociation and the accompanying increase in fractional ionization is examined for conditions typical of electron-beam-sustained KrF* lasers. It is found that for electron-density–F2-density ratios greater than about 10−3, rare-gas metastable loss due to electron excitation of higher levels begins to compete significantly with metastable-F2 reactions, thereby leading to a substantial reduction in rare gas–halide production efficiency.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call